MEMS TechnologyLaajuus (5 cr)

Objective

After completing the course, the student
• understands the fundamental concepts, including MEMS fabrication techniques, design principles, and modelling
• knows several MEMS sensors and their operating principles
• is aware of the diverse applications of MEMS technology across industries such as electronics, healthcare, and automotive
• has a solid understanding of MEMS technology's theoretical foundations, practical fabrication processes, design considerations, sensor functionalities, and real-world applications.

Content

• Introduction to MEMS Technology
• MEMS Fabrication Processes
• Design and Modeling
• Introduction to MEMS Sensors
• Applications of MEMS Technology

Qualifications

Analog IC Design or equivalent knowledge

Assessment criteria, satisfactory (1)

The student
• has achieved the objectives of the course to a satisfactory level
• is able to identify, define and use concepts and models in the subject area of the course
• understands the conditions and principles of the development of expertise
• has completed the learning tasks required for the course to the minimum standard
• has developed their competences in such a way that they will be able to complete their future professional studies and eventually work in the field.

Assessment criteria, good (3)

The student
• has achieved the objectives of the course well, although there are still areas where knowledge and skills need to be improved
• has completed the learning tasks of the course at a satisfactory or good level
• has a good understanding of the concepts and models of the subject matter of the course and is able to carry out a reasoned analysis
• is able to apply what they have learned in learning and working situations
• understands the importance of expertise in the field and is able to analyse their own expertise.

Assessment criteria, excellent (5)

The student
• has achieved the objectives of the course with excellent marks
• has completed the learning tasks of the course at a good or excellent level
• has an excellent command of the concepts and models of the subject matter of the course
• is able to analyse clearly and reasonably and propose practical development measures
• has a good ability to apply what they have learned in learning and working situations
• is able to analyse their expertise in their field and their own development towards expertise.