Study Guide

Objective

After completing the course, the students will understand the fundamental concepts, including MEMS fabrication techniques, design principles, and modeling. They will gain insights into various MEMS sensors and their operating principles. Students will explore the diverse applications of MEMS technology across industries such as electronics, healthcare, and automotive. By course completion, learners will possess a solid understanding of MEMS technology's theoretical foundations, practical fabrication processes, design considerations, sensor functionalities, and real-world applications.

Content

Introduction to MEMS Technology
MEMS Fabrication Processes
Design and Modeling
Introduction to MEMS Sensors
Applications of MEMS Technology

Prerequisites

Analog IC Design or equivalent knowledge

Assessment criteria, satisfactory (1)

The student has achieved the course objectives fairly. The student will be able to identify, define and use the course subject area’s concepts and models. The student understands the criteria and principles of the expertise development. The student has completed the required learning exercises in minimum requirement level. His/her competences have developed in a way that he/she may complete the remaining studies in the degree and finally work in a suitable job position related to this field.

Assessment criteria, good (3)

The student has achieved the course objectives well, even though the knowledge and skills need improvement on some areas. The student has completed the required learning exercises in good or satisfactory level. The student is able to define the course concepts and models and is able to justify the analysis. The student is able to apply their knowledge in study and work situations. The student understands the importance of expertise in their field and is able to analyze his/her own expertise.

Assessment criteria, excellent (5)

The student has achieved the objectives of the course with excellent marks. The student masters commendably the course subject area’s concepts and models. The student has completed the required learning exercises in good or excellent level. The student is able to make justified and fluent analysis and to present concrete development measures. The student is well prepared to apply their knowledge study and work situations. The student is are able to analyze the expertise in their field and the evolvement of their own expertise.